Lund Nano Lab (LNL) belongs to the Division of Solid State Physics (FTF) and the NanoLund consortium and serves as the main nanofabrication facility. The LNL consists of two main parts: the Nano-process lab on the ground floor and the Nano-epitaxy lab on the second floor with about 340 m2 of ISO 5-7 cleanroom area. The Nano-epitaxy laboratory is connected to the cleanroom part of the older Berzelius lab, increasing the total accessible cleanroom area to about 600 m2. The image above shows the LNL (left) and the building of FTF (right).
The laboratory is available to all NanoLund members, other academic groups, both within Lund University and outside and companies. LNL staff regularly provide cleanroom safety introduction courses and individual hands-on training on lab equipment. The list of available lab equipment including the tool responsible persons can be found through LIMS.
Since April 2016 LNL has been a member of Myfab.
Key features of LNL:
- Fabrication and analysis of structures on the nanometer-scale
- Integration between epitaxy and processing
- Open cleanroom facility for academic research and companies
- 600 m2 cleanroom for cutting edge nanofabrication
- Industrial product development and prototype testing
Lund Nano Lab is one of the main resources within NanoLund and provides support to research groups in strategically important areas of research such as:
- Nanowire growth and material science
- Fundamental and device physics, electronics and photonics
- Nano-bio and life science
- Nanoimprint lithography
- Growth and physics of new materials
- Nanowire-based photo-voltaics
- Processing of nanoelectronic devices and circuits
Laboratory Director: Maria Huffman
Site responsible: Ivan Maximov
Updated: May 3, 2018