NNEN Meeting on Dry Etch and Thin Films at Lund Nano Lab
As part of cooperation between Scandinavian cleanrooms, Lund Nano Lab (LNL) organised a joint meeting of experts in Dry Etching and Thin Films on November 16-17, 2017. Such meetings arranges on a regular basis within the Nordic Nanolab Expert Network (NNEN) – a Scandinavia-wide discussion platform of experts and lab staff in dry etching, lithography, thin films, characterisation and facility operations. The meeing in Lund, a joint workshop of specialists in dry etching and thin films from Sweden, Norway and Denmark, was held immediately after the Plasma Processing Workshop. During two intensive half-days, 24 experts from 8 labs had discussions on equipment, process technologies and problem solving.
Text and images: Ivan Maximov