Jan
NanoScience Colloquium by Dmitry Suyatin, Co-founder and CSO of AlixLabs company
Atomic Layer Etch Pitch Splitting (APS™) Technology by AlixLabs
Abstract:
AlixLabs, spun off from NanoLund, is the world’s only pure-play Atomic Layer Etch (ALE) company, developing technologies that make semiconductor manufacturing in the ångström era more accessible, sustainable, and efficient.
Our flagship ALE Pitch Splitting (APS™) process enables the precise and efficient manufacturing of extremely fine structures, with critical dimensions below 10 nm, by utilizing sidewalls as natural etch masks. APS reduces the number of steps required in chip manufacturing, thereby lowering capital expenditures and increasing throughput, while simultaneously minimizing emissions and the consumption of energy and water.
In this talk, I will outline the development of APS™ at AlixLabs, from its initial discovery to a pilot-line compatible tool, and present our roadmap toward high-volume manufacturing. I will explain how APS complements existing patterning methods, discuss the challenges of transferring lab innovations into industrial applications, and share practical insights on turning nanoscience into real-world technologies.
About the event
Location:
Q179 (k-space), Dept. of Physics, Professorsgatan 1, Lund
Contact:
anna-karin [dot] alm [at] ftf [dot] lth [dot] se