Technology highlights at ASML by adjunct professor Peter Smorenburg

Abstract: ASML is a world-leading supplier of nanolithography tools for large-scale chip manufacturing. Over the past decades, the resolution of these nanolithography tools has progressively improved, from the micrometer scale all the way down to a few tens of nanometers, while maintaining a throughput well over a hundred full-size wafers per hour. Making this happen has required, and still requires, major engineering efforts and synergetic innovations in diverse domains, including light sources, optical design, mechatronics, plasma physics, metrology, and more.

This is why the ASML Research department nurtures an innovation ecosystem involving a wide academic network, which also includes Lund University. In this talk, Peter will give an overview of some of the major technological innovations that have contributed to the success of ASML, illustrating how sustained, cross-disciplinary research is essential to pushing the boundaries of nanolithography further.

The seminar should be of broad interest to researchers within Light & Materials. Fika is served from 15:00.

You are warmly welcome.

Best regards,

Tönu

Light & Materials