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Portrait of Heiner Linke; Photo: Kennet Ruona

Heiner Linke

Professor, Deputy dean at Faculty of Engineering, LTH

Portrait of Heiner Linke; Photo: Kennet Ruona

Optimization of a self-closing effect to produce nanochannels with top slits in fused silica

Author

  • Mariusz Graczyk
  • Martina Balaz
  • Anders Kvennefors
  • Heiner Linke
  • Ivan Maximov

Summary, in English

The authors report on the fabrication of subsurfaced 100-600 nm wide nanochannels in fused silica with top slit openings in the size range of 5-10 nm. Such nanochannels can be used in combination with a nanofluidics system to guide molecular motors and quickly switch the chemical environment inside the nanochannels through diffusion via the top slits. To realize nanochannel top slits in this size range, the authors here demonstrate the use of a self-closing effect based on the volume expansion of a thin Si layer during oxidation. A high contrast electron beam lithography exposure step in conjunction with dry etching of SiO2 by reactive ion etching (RIE) and Si by inductively coupled plasma-RIE followed by wet etching of a fused silica substrate is used to create the initial slit before oxidation. The details of nanochannel fabrication steps are described and discussed. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4766317]

Department/s

  • Solid State Physics
  • NanoLund

Publishing year

2012

Language

English

Publication/Series

Journal of Vacuum Science and Technology B

Volume

30

Issue

6

Document type

Journal article

Publisher

American Institute of Physics (AIP)

Topic

  • Condensed Matter Physics

Status

Published

ISBN/ISSN/Other

  • ISSN: 1520-8567