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Portrait of Heiner Linke; Photo: Kennet Ruona

Heiner Linke

Professor, Deputy dean at Faculty of Engineering, LTH

Portrait of Heiner Linke; Photo: Kennet Ruona

Electron-Beam Patterning of Polymer Electrolyte Films To Make Multiple Nanoscale Gates for Nanowire Transistors

Author

  • Damon J. Carrad
  • Adam M. Burke
  • Roman W. Lyttleton
  • Hannah J. Joyce
  • Hark Hoe Tan
  • Chennupati Jagadish
  • Kristian Storm
  • Heiner Linke
  • Lars Samuelson
  • Adam P. Micolich

Summary, in English

We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthreshold swings comparable to conventional metal/oxide wrap-gated nanowire transistors. Patterning eliminates gate/contact overlap, which reduces parasitic effects and enables multiple, independently controllable gates. The method's simplicity broadens the scope for using polymer electrolyte gating in studies of nanowires and other nanoscale devices.

Department/s

  • Solid State Physics

Publishing year

2014

Language

English

Pages

94-100

Publication/Series

Nano Letters

Volume

14

Issue

1

Document type

Journal article

Publisher

The American Chemical Society (ACS)

Topic

  • Nano Technology

Keywords

  • III-V nanowires
  • polymer electrolytes
  • electron beam lithography
  • nanoelectronics

Status

Published

Research group

  • Nanometer structure consortium (nmC)

ISBN/ISSN/Other

  • ISSN: 1530-6992