
Ivan Maximov
Associate Professor

Research:
Research interests: technology of semiconductor nanostructures, including electron beam (EBL) and nanoimprint lithography (NIL), block copolymer (BCP) lithography, focused ion beams (FIB), low-energy reactive ion etching (RIE) techniques.
At the moment I am a Research Infrastructure Fellow (RIF) of the Swedish Foundation of Strategic Research (SSF) at Lund Nano Lab. This SSF-grant (2016-2020) gives me a possibility to develop nanoimprint infrastructure at LNL, which includes both methods and applications of nanoimprint in large-scale patterning for fabrication of III-V nanowires and other nano-devices.
I also work to develop novel, high-resolution methods of nano lithography based on block copolymers (BCP) to reach sub-10 nm features. One of possible applications of such lithography would be technology of ultra-small III-V nanowires.
Teaching:
1. The course "Advanced Processing of Nanostructures" (Avancerad Framställning av Nanostrukturer) FFFN01 or FYST31, is given 2 times a year. The aim of the course is to teach different methods of fabrication of semiconductor nanostructures, with emphasis on practical work in our cleanroom (Lund Nano Lab). The course includes (a) 8 hours of lectures, (b) 3 laboratory works and (c) a 6 to 8 week-long project work. The project work is oriented towards our research activity and supervised by the lab staff and PhD-students. Due to "hands on" orientation of the course, the students work in the labs in small (2-4 persons) groups, which makes it possible to teach them different technological methods in a very efficient way.
According to the course evaluations made in 2009 - 2013, the course is ranked highly by the students. Most course participants appreciate practical experience they get during the laboratory and project work in the Lund Nano Lab. "It's a really good course overall", "Good combination of lectures and labs", "It was actually one of the best courses I've taken here at LTH" - here is just a few comments by the course participants.
Due to the practical nature of the course and restrictions of our cleanroom, the number of students is limited to 12 persons.
Go to course page of Advanced Processing of Nanostructures
Go to pages of Lund Nano Lab
2. Apart from the regular teaching, I am also responsible for the Lund Nano Lab cleanroom and safety course, which is given appoximately every 3-4 weeks. All new users of the Lund Nano Lab must attend this course in order to start using the cleanroom. The dates of the course are announced on the Lund Nano Lab laboratory information and management server
Publications
Displaying of publications. Sorted by year, then title.
Directed Self‐Assembly for Dense Vertical III–V Nanowires on Si and Implications for Gate All‐Around Deposition
Anette Löfstrand, Reza Jafari Jam, Johannes Svensson, Adam Jönsson, Heera Menon, et al.
(2022) Advanced Electronic Materials
Journal articleComparison of UV-curable materials for high-resolution polymer nanoimprint stamps
Muhammad Asif, Mariusz Graczyk, Babak Heidari, Ivan Maximov
(2022) Micro and Nano Engineering, 14
Journal articleSequential Infiltration Synthesis into Maltoheptaose and Poly(styrene): Implications for Sub-10 nm Pattern Transfer
Anette Löfstrand, Alexei Vorobiev, Muhammad Mumtaz, Redouane Borsali, Ivan Maximov
(2022) Polymers, 14 p.1-12
Journal articleInvestigating the Secondary Electron Emission of Nanomaterials Induced by a High-Resolution Proton Beam
Marian Cholewa, Anna Gredysa, Andrii Pozaruk, Thomas Osipowicz, Jeroen A. van Kan, et al.
(2022) Physica Status Solidi (B)
Journal articlePoly(styrene)- block-Maltoheptaose Films for Sub-10 nm Pattern Transfer : Implications for Transistor Fabrication
Anette Löfstrand, Reza Jafari Jam, Karolina Mothander, Tommy Nylander, Muhammad Mumtaz, et al.
(2021) ACS Applied Nano Materials, 4 p.5141-5151
Journal articleSequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer
Anette Löfstrand, Reza Jafari Jam, Muhammad Mumtaz, Karolina Mothander, Tommy Nylander, et al.
(2021) Proceedings of SPIE - The International Society for Optical Engineering, 11612
Conference paperWafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography
Víctor J. Gómez, Mariusz Graczyk, Reza Jafari Jam, Sebastian Lehmann, Ivan Maximov
(2020) Nanotechnology, 31
Journal articleFeature size control using surface reconstruction temperature in block copolymer lithography for InAs nanowire growth
Anette Löfstrand, Johannes Svensson, Lars Erik Wernersson, Ivan Maximov
(2020) Nanotechnology, 31
Journal articleSub-10 nm Block Copolymer Lithography: Sequential Infiltration Synthesis into Poly(Styrene)-block-Maltoheptaose
Anette Löfstrand, Dmitry Suyatin, Nicklas Nilsson, Issei Otsuka, Anders Kvennefors, et al.
(2019)
PosterDisplacement Talbot Lithography for Fabrication of Large Area Nanoimprint Stamps
Mariusz Graczyk, Muhammad Asif, Ivan Maximov
(2019)
PosterNovel Lift-off Process for DUV Displacement Talbot Lithography
Mariusz Graczyk, Victor Gomez, Maria Huffman, Ivan Maximov
(2019)
PosterDesign and development of nanoimprint-enabled structures for molecular motor devices
Frida W. Lindberg, Till Korten, Anette Löfstrand, Mohammad A. Rahman, Mariusz Graczyk, et al.
(2019) Materials Research Express, 6
Journal articleHigh-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching
Sabbir Ahmed Khan, Dmitry Suyatin, Jonas Sundqvist, Mariusz Graczyk, Marcel Junige, et al.
(2018) ACS Applied Nano Materials , p.2476-2482
Journal articleNanoimprint stamps with ultra-high resolution : Optimal fabrication techniques
Mariusz Graczyk, Andrea Cattoni, Benedikt Rösner, Gediminas Seniutinas, Anette Löfstrand, et al.
(2018) Microelectronic Engineering, 190 p.73-78
Journal articleBlock Copolymer Nanopatterning of Dielectric Mask for Selective Area InAs Vertical Nanowire Growth
Anette Löfstrand, Mariusz Graczyk, Dmitry Suyatin, Anders Kvennefors, Ivan Maximov, et al.
(2018)
Conference paper: abstractA Method for Investigation of Size-Dependent Protein Binding to Nanoholes Using Intrinsic Fluorescence of Proteins
Bita Malekian, Ivan Maximov, Rainer Timm, Tommy Cedervall, Dan Hessman
(2017) ACS Omega, 2 p.4772-4778
Journal articleCarbohydrate-based block copolymer systems : Directed self-assembly for nanolithography applications
I. Otsuka, N. Nilsson, D. B. Suyatin, I. Maximov, R. Borsali
(2017) Soft Matter, 13 p.7406-7411
Journal articleStrategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography
Gaute Otnes, Magnus Heurlin, Mariusz Graczyk, Jesper Wallentin, Daniel Jacobsson, et al.
(2016) Nano Research, 9 p.2852-2861
Journal articleScalable, high performance, enzymatic cathodes based on nanoimprint lithography
Dmitry Pankratov, Richard Sundberg, Javier Sotres, Dmitry Suyatin, Ivan Maximov, et al.
(2015) Beilstein Journal of Nanotechnology, 6 p.1377-1384
Journal articleTransparent and flexible, nanostructured and mediatorless glucose/oxygen enzymatic fuel cells
Dmitry Pankratov, Richard Sundberg, Javier Sotres, Ivan Maximov, Mariusz Graczyk, et al.
(2015) Journal of Power Sources, 294 p.501-506
Journal articleConcept for assembling individual nanostructure-based components into complex devices
Dmitry Suyatin, Richard Sundberg, Ivan Maximov, Sergey Shleev, Lars Montelius
(2015) Journal of Vacuum Science and Technology B, 33
Journal articleIII-V Nanowire Synthesis by Use of Electrodeposited Gold Particles.
Reza Jafari Jam, Magnus Heurlin, Vishal Jain, Anders Kvennefors, Mariusz Graczyk, et al.
(2015) Nano Letters, 15 p.134-138
Journal articleEfficient ultra-thin transmission silicon detectors for a single-ion irradiation system at the Lund Ion Beam Analysis Facility
N. S. Abdel, Jan Pallon, Mariusz Graczyk, Ivan Maximov
(2014) Journal of Instrumentation, 9
Journal articleThe influence of nanoparticles on enzymatic bioelectrocatalysis
Dmitry Pankratov, Richard Sundberg, Dmitry Suyatin, Javier Sotres, Alejandro Barrantes, et al.
(2014) RSC Advances, 4 p.38164-38168
Journal articleStrong Schottky barrier reduction at Au-catalyst/GaAs-nanowire interfaces by electric dipole formation and Fermi-level unpinning
Dmitry Suyatin, Vishal Jain, Valery A Nebol’sin, Johanna Trägårdh, Maria Messing, et al.
(2014) Nature Communications, 5
Journal articleEnhanced Anisotropic Effective g Factors of an Al10.25Ga0.75N/GaN Heterostructure Based Quantum Point Contact
Fangchao Lu, Ning Tang, Shaoyun Huang, Marcus Larsson, Ivan Maximov, et al.
(2013) Nano Letters, 13 p.4654-4658
Journal articleDynamic Guiding of Motor-Driven Microtubules on Electrically Heated, Smart Polymer Tracks
Viktor Schroeder, Till Korten, Heiner Linke, Stefan Diez, Ivan Maximov
(2013) Nano Letters, 13 p.3434-3438
Journal articleFabrication and Characterization of Ultra-Thin PIN Silicon Detectors for Counting the Passage of MeV Ions
Naseem Abdel, Jan Pallon, Mariusz Graczyk, Ivan Maximov, Lars Wallman
(2013) IEEE Transactions on Nuclear Science, 60 p.1182-1188
Journal articleDigital in-line holography on amplitude and phase objects prepared with electron beam lithography.
Jörg Schwenke, Eleonora Lorek, Rafal Rakowski, Xinkui He, Anders Kvennefors, et al.
(2012) Journal of Microscopy, 247 p.196-201
Journal articleOptimization of a self-closing effect to produce nanochannels with top slits in fused silica
Mariusz Graczyk, Martina Balaz, Anders Kvennefors, Heiner Linke, Ivan Maximov
(2012) Journal of Vacuum Science and Technology B, 30
Journal articleThe c-axis thermal conductivity of graphite film of nanometer thickness measured by time resolved X-ray diffraction
Maher Harb, Clemens von Korff Schmising, Henrik Enquist, Andrius Jurgilaitis, Ivan Maximov, et al.
(2012) Applied Physics Letters, 101
Journal articleFabrication of bottle-shaped nanochannels in fused silica using a self-closing effect
Mariusz Graczyk, Martina Balaz, Heiner Linke, Ivan Maximov
(2012) Microelectronic Engineering, 97 p.173-176
Journal articleMemristive and Memcapacitive Characteristics of a Au/Ti-HfO2-InP/InGaAs Diode
Jie Sun, Erik Lind, Ivan Maximov, Hongqi Xu
(2011) IEEE Electron Device Letters, 32 p.131-133
Journal articleFabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate
Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Jinkui Chu, et al.
(2011) Microelectronic Engineering, 88 p.3108-3112
Journal articleEfficient methods of nanoimprint stamp cleaning based on imprint self-cleaning effect.
Fantao Meng, Gang Luo, Ivan Maximov, Lars Montelius, Ye Zhou, et al.
(2011) Nanotechnology, 22
Journal articleGate-defined double quantum dot with integrated charge sensors realized in InGaAs/InP by incorporating a high-kappa dielectric
Jie Sun, Marcus Larsson, Ivan Maximov, Hongqi Xu
(2010) Applied Physics Letters, 96
Journal articleNonlinear electrical properties of Si three-terminal junction devices
Fantao Meng, Jie Sun, Mariusz Graczyk, Kailiang Zhang, Mika Prunnila, et al.
(2010) Applied Physics Letters, 97
Journal articleGate-defined quantum devices realized on an InGaAs/InP heterostructure by incorporating a high-kappa dielectric material
Jie Sun, Marcus Larsson, Ivan Maximov, Hongqi Xu
(2009) 2009 IEEE Nanotechnology Materials and Devices Conference , p.183-185
Conference paperGate-defined quantum-dot devices realized in InGaAs/InP by incorporating a HfO2 layer as gate dielectric
Jie Sun, Marcus Larsson, Ivan Maximov, Hilde Hardtdegen, Hongqi Xu
(2009) Applied Physics Letters, 94
Journal articleA sequential logic device realized by integration of in-plane gate transistors in InGaAs/InP
Jie Sun, Daniel Wallin, Yuhui He, Ivan Maximov, Hongqi Xu
(2008) Applied Physics Letters, 92
Journal articleA novel SR latch device realized by integration of three-terminal ballistic junctions in InGaAs/InP
Jie Sun, Daniel Wallin, Ivan Maximov, Hongqi Xu
(2008) IEEE Electron Device Letters, 29 p.540-542
Journal articleElectrical properties of self-assembled branched InAs nanowire junctions
Dmitry Suyatin, Jie Sun, Andreas Fuhrer, Daniel Wallin, Linus Fröberg, et al.
(2008) Nano Letters, 8 p.1100-1104
Journal articleTransport properties of three-terminal ballistic junctions realized by focused ion beam enhanced etching in InGaAs/InP
Martin Frimmer, Jie Sun, Ivan Maximov, Hongxing Xu
(2008) Applied Physics Letters, 93
Journal articleNovel room-temperature functional analogue and digital nanoelectronic circuits based on three-terminal ballistic junctions and planar quantum-wire transistors
Jie Sun, Daniel Wallin, Patrik Brusheim, Ivan Maximov, Hongqi Xu
(2008) Journal of Physics: Conference Series, 100 p.052073-052073
Conference paperFrequency mixing and phase detection functionalities of three-terminal ballistic junctions
Jie Sun, Daniel Wallin, Patrik Brusheim, Ivan Maximov, Z. G. Wang, et al.
(2007) Nanotechnology, 18
Journal articleSulfur passivation for ohmic contact formation to InAs nanowires
Dmitry Suyatin, Claes Thelander, M. T. Björk, Ivan Maximov, Lars Samuelson
(2007) Nanotechnology, 18
Journal articleProperties of electrical contacts to filamentary nanocrystals
Dmitry Suyatin, H. Pettersson, Ivan Maximov, E.S. Soldatov, Lars Samuelson
(2007) Vestnik Voronezskogo Gosudarstvennogo Tehnicheskogo Universiteta, 3 p.67-70
Journal articleNovel nanoelectronic device applications based on the nonlinearity of three-terminal ballistic junctions
Jie Sun, Daniel Wallin, Patrik Brusheim, Ivan Maximov, Z. G. Wang, et al.
(2007) Physics of Semiconductors, Pts A and B, 893 p.1471-1472
Conference paperNanoimprint lithography for the fabrication of interdigitated cantilever arrays
Gang Luo, Ivan Maximov, David Adolph, Mariusz Graczyk, Patrick Carlberg, et al.
(2006) Nanotechnology, 17 p.1906-1910
Journal articleSynthesis and characterization of cobalt silicide films on silicon
C T Joensson, Ivan Maximov, Harry J Whitlow, V. Shutthanandan, L. Saraf, et al.
(2006) Ion Beam Analysis - Proceedings of the Seventeenth International Conference on Ion Beam Analysis (Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms), 249 p.532-535
Conference paperMagnetostatic interactions in planar ring-like nanoparticle structures
Yu.A. Koksharov, G.B. Khomutov, E.S. Soldatov, Dmitry Suyatin, Ivan Maximov, et al.
(2006) Thin Solid Films, 515 p.731-734
Journal articleAn electrically tunable interdigitated cantilever array fabricated by nanoimprint lithography
Gang Luo, Sara Ghatnekar-Nilsson, Ivan Maximov, Mariusz Graczyk, Patrick Carlberg, et al.
(2006) Book of abstracts: Intl Conf on Nanoimprint and Nanoprint Technology, San Fransisco, Ca, USA (2006)
Conference paperNovel nanoelectronic device applications based on the non-linearity of three-terminal ballistic junctions
Jie Sun, Daniel Wallin, Patrik Brusheim, Ivan Maximov, Hongqi Xu
(2006) Book of abstracts: 28th Intl Conf Physics Semiconductors, Vienna, Austria (2006)
Conference paperNanoimprint-based fabrication and characterization of interdigitated cantilevver array
Gang Luo, Sara Ghatnekar-Nilsson, Ivan Maximov, Mariusz Graczyk, Patrick Carlberg, et al.
(2006) Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006)
Conference paperNanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures
Gang Luo, Ivan Maximov, Sara Ghatnekar-Nilsson, David Adolph, Mariusz Graczyk, et al.
(2006) Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006)
Conference paperElectrical properties of three-terminal InAs nanowire junctions
Dmitry Suyatin, Hongqi Xu, Daniel Wallin, Linus Fröberg, Lisa Karlsson, et al.
(2006)
Conference paperFabrication and electron transport study of three-terminal InAs nanowire junctions
Dmitry Suyatin, Daniel Wallin, Linus Fröberg, Lisa Karlsson, Ivan Maximov, et al.
(2006) Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006)
Conference paperMicrowave detection at 110 GHz by nanowires with broken symmetry
C Balocco, AM Song, M Aberg, A Forchel, T Gonzalez, et al.
(2005) Nano Letters, 5 p.1423-1427
Journal articleNanoimprint technology for fabrication of tunable grating structures
Gang Luo, Ivan Maximov, Mariusz Graczyk, David Adolph, Patrick Carlberg, et al.
(2005) Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)
Conference paperSulfur passivation for formation of Ohmic contacts to InAs nanowire devices
Dmitry Suyatin, Mikael Björk, Claes Thelander, Ivan Maximov, Lars Samuelson
(2005) Book of extended abstracts: 31st Intl Conf Micro- and Nano-Engineering, Vienna, Austria (2005)
Conference paperElectrical contacts technology for single nanowires and molecules
Dmitry Suyatin, Mikael Björk, Claes Thelander, Richard Bunk, Ivan Maximov, et al.
(2005) Book of extended abstracts: Niels Bohr Summer School, Copenhagen, Denmark (2005)
Conference paperAn alignment procedure for nanoimprint lithography at the sub-20 nm level
David Adolph, E Bolmsjö, Elke Theander, R Saers, Mariusz Graczyk, et al.
(2005) Book of extended abstracts: 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)
Conference paperNanometer-scale two-terminal semiconductor memory operating at room temperature
Aimin Song, M Missous, Pär Omling, Ivan Maximov, Werner Seifert, et al.
(2005) Applied Physics Letters, 86
Journal articleNanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, et al.
(2004) Microelectronic Engineering, 73-74 p.837-842
Journal articleNanoimprint - a tool for realizing nano-bio research
Patrick Carlberg, F Johansson, Thomas Mårtensson, Richard Bunk, Marc Beck, et al.
(2004) 2004 4th IEEE Conference on Nanotechnology , p.199-200
Conference paperNovel nanoelectronic triodes and logic devices with TBJs
Hongqi Xu, Ivan Shorubalko, Daniel Wallin, Ivan Maximov, Pär Omling, et al.
(2004) IEEE Electron Device Letters, 25 p.164-166
Journal articleDiode-like characteristics of nanometer-scale semiconductor channels with a broken symmetry
AM Song, Ivan Maximov, M Missous, Werner Seifert
(2004) Proceedings of the Eleventh International Conference on Modulated Semiconductor Structures (Physica E: Low-dimensional Systems and Nanostructures), 21 p.1116-1120
Conference paperDiode-like characteristics of nanometer-scale semiconductor channels with broken symmetry
Aimin Song, Ivan Maximov, M Missous, Werner Seifert
(2004) Physica E 21, 1116-1120 (2004)
Conference paperRoom-temperature nanoelectronic logic devices with ballistic junctions
Hongqi Xu, Daniel Wallin, I Shorubalko, Ivan Maximov, Pär Omling, et al.
(2004) Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004)
Conference paperNanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography
Marc Beck, F Persson, Patrick Carlberg, Mariusz Graczyk, Ivan Maximov, et al.
(2004) Microelectr Engin 73-74, 837-842 (2004)
Conference paperNanoimprint – a tool for realizing nano-bio research
Patrick Carlberg, F Johansson, Thomas Mårtensson, Marc Beck, F Persson, et al.
(2004) Book of extended abstracts: 8th Intl Conf Nanoscale Sci Technol, Venice, Italy (2004)
Conference paperLithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
Harry J Whitlow, May Ling Ng, Vaida Auzelyte, Ivan Maximov, Lars Montelius, et al.
(2004) Nanotechnology, 15 p.223-226
Journal articleFluorescence microscopy for quality control in nanoimprint lithography
C Finder, Marc Beck, J Seekamp, K Pfeiffer, P Carlberg, et al.
(2003) Microelectronic Engineering (Proceedings of the 28th International Conference on Micro- and Nano-Engineering), 67-8 p.623-628
Conference paperLift-off process for nanoimprint lithography
Patrick Carlberg, Mariusz Graczyk, Eva-Lena Sarwe, Ivan Maximov, Marc Beck, et al.
(2003) Microelectronic Engineering, 67-8 p.203-207
Conference paperMetal nanoelectrodes for molecular transistor and investigation of electron transport in molecular systems.
Dmitry Suyatin, E.S. Soldatov, Ivan Maximov, Lars Montelius, Lars Samuelson, et al.
(2003) [Host publication title missing], 5023 p.327-329
Conference paperThe influence of confining wall profile on quantum interference effects in etched Ga0.25In0.75As/InP billiards
TP Martin, RP Taylor, H Linke, CA Marlow, GDR Hall, et al.
(2003) Superlattices and Microstructures, 34 p.179-184
Journal articleA comparison of thermally and photochemically cross-linked polymers for nanoimprinting
K Pfeiffer, F Reuther, M Fink, G Gruetzner, Patrick Carlberg, et al.
(2003) Microelectronic Engineering, 67-8 p.266-273
Journal articleNanoimprint technology for fabrication of three-terminal ballistic junction devices in GaInAs/InP
Ivan Maximov, Patrick Carlberg, Ivan Shorubalko, Daniel Wallin, Eva-Lena Sarwe, et al.
(2003) Microelectronic Engineering, 67-8 p.196-202
Journal articleMolecular cluster based nanoelectronics
ES Soldatov, SP Gubin, Ivan Maximov, GB Khomutov, VV Kolesov, et al.
(2003) Microelectronic Engineering, 69 p.536-548
Journal articleNanoimprint lithography for fabrication of three-terminal ballistic junctions in InP/GaInAs
Ivan Maximov, Patrick Carlberg, Daniel Wallin, Ivan Shorubalko, Werner Seifert, et al.
(2002) Nanotechnology, 13 p.666-668
Journal articleInvestigation of polymethylmethacrylate resist residues using photoelectron microscopy
Ivan Maximov, AA Zakharov, Tommy Holmqvist, Lars Montelius, Ingolf Lindau
(2002) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 20 p.1139-1142
Conference paperFabrication of Si-based nanoimprint stamps with sub-20 nm features
Ivan Maximov, Eva-Lena Sarwe, Marc Beck, Knut Deppert, Mariusz Graczyk, et al.
(2002) MICROELECTRONIC ENGINEERING, 61-2 p.449-454
Conference paperNanoimprint in mr-L 6000.1 XP/PMMA resist system
Patrick Carlberg, Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, et al.
(2002) 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Conference paperQuantative photoelectron spectromicroscopy for investigation of PMMA resist residues
Alexei Zakharov, Ivan Maximov, T. Holmqvist, Lars Montelius, Ingolf Lindau
(2002) 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Conference paperNew high resolution negative resist mr-L 6000.1 XP for electron beam and nanoimprint lithography
Ivan Maximov, Marc Beck, Patrick Carlberg, Lars Montelius, K. Pfeiffer, et al.
(2002) 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Conference paperNext generation nanotechnologies for sensor array fabrication
Lars Montelius, Marc Beck, T. Ling, Patrick Carlberg, Mariusz Graczyk, et al.
(2002) 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Conference paperA novel frequency-doubling device based on three-terminal ballistic junction
Ivan Shorubalko, Hongqi Xu, Ivan Maximov, D. Nilsson, Pär Omling, et al.
(2002) Device Research Conference (Cat. No.02TH8606) , p.159-160
Conference paperThree-terminal ballistic junctions: new building blocks for functional devices in nanoelectronics
Hongqi Xu, Ivan Shorubalko, Ivan Maximov, Werner Seifert, Pär Omling, et al.
(2002) 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Conference paperA novel device principle for nanoelectronics
Hongqi Xu, Ivan Shorubalko, Ivan Maximov, Werner Seifert, Pär Omling, et al.
(2002) Materials Science and Engineering C: Materials for Biological Applications, 19 p.417-420
Journal articleA novel frequency-multiplication device based on three-terminal ballistic junction
Ivan Shorubalko, Hongqi Xu, Ivan Maximov, D Nilsson, Pär Omling, et al.
(2002) IEEE Electron Device Letters, 23 p.377-379
Journal articleInvestigation of PMMA resist residues using photoelectron microscopy
Ivan Maximov, Alexei Zakharov, T. Holmqvist, Lars Montelius, Ingolf Lindau
(2002) Journal of Vacuum Science and Technology, B20 p.1139-1142
Journal articlePolymer stamps for nanoimprinting
K Pfeiffer, M Fink, G Ahrens, G Gruetzner, F Reuther, et al.
(2002) Microelectronic Engineering, 61-2 p.393-398
Journal articleImproving stamps for 10 nm level wafer scale nanoimprint lithography
Marc Beck, Mariusz Graczyk, Ivan Maximov, Eva-Lena Sarwe, TGI Ling, et al.
(2002) Microelectronic Engineering, 61-2 p.441-448
Journal articleHigh frequency characterization of a GaInAs/InP electronic waveguide T-branch switch
R Lewen, Ivan Maximov, Ivan Shorubalko, Lars Samuelson, L Thylen, et al.
(2002) Applied Physics Reviews, 91 p.2398-2402
Journal articleReevaluation of blueshifts introduced by lateral confinement in quantum-well wire structures
Anders Gustafsson, X Liu, Ivan Maximov, Lars Samuelson, Werner Seifert
(1993) Applied Physics Letters, 12 p.1709-1711
Journal article