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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Investigation of PMMA resist residues using photoelectron microscopy

Author

  • Ivan Maximov
  • Alexei Zakharov
  • T. Holmqvist
  • Lars Montelius
  • Ingolf Lindau

Department/s

  • Solid State Physics
  • MAX IV Laboratory
  • Neuronano Research Center (NRC)

Publishing year

2002

Language

English

Pages

1139-1142

Publication/Series

Journal of Vacuum Science and Technology

Volume

B20

Issue

3

Document type

Journal article

Topic

  • Physical Sciences
  • Natural Sciences

Status

Published

Research group

  • Neuronano Research Center (NRC)