Your browser has javascript turned off or blocked. This will lead to some parts of our website to not work properly or at all. Turn on javascript for best performance.

The browser you are using is not supported by this website. All versions of Internet Explorer are no longer supported, either by us or Microsoft (read more here: https://www.microsoft.com/en-us/microsoft-365/windows/end-of-ie-support).

Please use a modern browser to fully experience our website, such as the newest versions of Edge, Chrome, Firefox or Safari etc.

Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

Author

  • Marc Beck
  • F Persson
  • Patrick Carlberg
  • Mariusz Graczyk
  • Ivan Maximov
  • TGI Ling
  • Lars Montelius

Summary, in English

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems.

Department/s

  • Solid State Physics

Publishing year

2004

Language

English

Pages

837-842

Publication/Series

Microelectronic Engineering

Volume

73-74

Document type

Journal article

Publisher

Elsevier

Topic

  • Condensed Matter Physics

Keywords

  • transducer
  • nanoimprint lithography
  • sensor
  • redox cycling
  • interdigitated array electrode

Status

Published

ISBN/ISSN/Other

  • ISSN: 1873-5568