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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Synthesis and characterization of cobalt silicide films on silicon

Author

  • C T Joensson
  • Ivan Maximov
  • Harry J Whitlow
  • V. Shutthanandan
  • L. Saraf
  • D. E. McCready
  • B. W. Arey
  • Y. Zhang
  • S. Thevuthasan

Summary, in English

Cobalt silicide has emerged as a leading contact material in silicon technology due to its low resistivity, high stability and small lattice mismatch. In this study, 0.2-0.4 mu m thick Co films were deposited on Si(100) wafers by RF magnetron sputtering at room temperature, and annealed at temperatures from 600 to 900 degrees C in vacuum. As-deposited and annealed samples were characterized by Rutherford backscattering spectrometry (RBS), nuclear reaction analysis (NRA), X-ray diffraction (XRD) and scanning electron microscopy (SEM). Although the Si substrates were sputter cleaned before the deposition, all the samples showed a thin oxide layer at the Si/Co interfaces. Annealing up to 700 degrees C did not alter the composition at the interface except small amount Co diffusion into Si. Annealing at 800 degrees C promotes the evaporation of the oxides from the interface and, as a result, clean CoSi2 films were formed. Although the interface appeared to be sharp within the RBS resolution after high temperature annealing, the surface topography was relatively rough with varying size of crystal grains. (c) 2006 Elsevier B.V. All rights reserved.

Department/s

  • Solid State Physics
  • Nuclear physics

Publishing year

2006

Language

English

Pages

532-535

Publication/Series

Ion Beam Analysis - Proceedings of the Seventeenth International Conference on Ion Beam Analysis (Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms)

Volume

249

Document type

Conference paper

Publisher

Elsevier

Topic

  • Subatomic Physics
  • Condensed Matter Physics

Keywords

  • magnetron sputtering
  • cobalt silicide
  • NRA
  • RBS

Conference name

Seventeenth International Conference on Ion Beam Analysis

Conference date

2005-06-26 - 2005-07-01

Conference place

Sevilla, Spain

Status

Published

ISBN/ISSN/Other

  • ISSN: 0168-583X