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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Next generation nanotechnologies for sensor array fabrication

Author

  • Lars Montelius
  • Marc Beck
  • T. Ling
  • Patrick Carlberg
  • Mariusz Graczyk
  • Ivan Maximov
  • Eva-Lena Sarwe

Summary, in English

New emerging technologies such as nanoimprint lithography (NIL) offers the biosensor research community the possibility to fabricate low-cost biodevices having nanometer dimensions. Such nanosized devices can be applied as biosensors where new functions might emerge due to the nanoscale dimensions. In this paper we will discuss various nanolithography methods as well as the benefits of going to the nanoscale for biosensor applications. We will also show results from mixed NIL and UV-lithography for fabrication of interdigitated nanobiosensor electrodes on up to 6'' large Si wafers. The electrode and inter-electrode distances were 100 nm wide over a total area of 200 μm×200 μm. We will also show the obtained enhanced efficiency of redox-recycling when utilizing such nanoscaled biosensors

Department/s

  • Solid State Physics

Publishing year

2002

Language

English

Publication/Series

7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science

Document type

Conference paper

Publisher

Lund University

Topic

  • Condensed Matter Physics

Keywords

  • interelectrode distances
  • Si wafers
  • interdigitated nanobiosensor electrodes
  • UV lithography
  • nanolithography
  • nanosized devices
  • nanometer dimensions
  • low cost biodevices
  • biosensor
  • nanoimprint lithography
  • sensor array fabrication
  • nanotechnology
  • Si
  • SiO<sub>2</sub>-Si
  • 100 nm
  • 200 micron
  • 6 inch
  • redox recycling

Conference name

Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)

Conference date

2002-06-24 - 2002-06-28

Conference place

Malmö, Sweden

Status

Published