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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Nanoimprint and reactive etching for fabrication of Si/SiO2 NEMS structures

Author

  • Gang Luo
  • Ivan Maximov
  • Sara Ghatnekar-Nilsson
  • David Adolph
  • Mariusz Graczyk
  • Patrick Carlberg
  • Dan Hessman
  • T Zhu
  • Z F Liu
  • Hongqi Xu
  • Lars Montelius

Department/s

  • Solid State Physics

Publishing year

2006

Language

English

Publication/Series

Book of extended abstracts: 14th Intl Symp “Nanostructures: Physics and Technology”, St Petersburg, Russia (2006)

Document type

Conference paper

Topic

  • Condensed Matter Physics

Conference name

14th Intl Symp “Nanostructures: Physics and Technology”, 2006

Conference date

2006-06-25 - 2006-06-30

Conference place

St Petersburg, Russian Federation

Status

Published