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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

An alignment procedure for nanoimprint lithography at the sub-20 nm level

Author

  • David Adolph
  • E Bolmsjö
  • Elke Theander
  • R Saers
  • Mariusz Graczyk
  • Dan Hessman
  • Ivan Maximov
  • Stefan Andersson-Engels
  • Anders Persson
  • Claes-Göran Wahlström
  • Marc Beck
  • Patrick Carlberg
  • B Heidari
  • Lars Montelius

Department/s

  • Solid State Physics
  • Internal Medicine - Epidemiology
  • Atomic Physics

Publishing year

2005

Language

English

Publication/Series

Book of extended abstracts: 49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)

Document type

Conference paper

Topic

  • Condensed Matter Physics
  • Atom and Molecular Physics and Optics

Conference name

49th Intl Conf on Electron, Ion, and Photon Beam Technol and Nanofabr, Orlando, Fl, USA (2005)

Conference date

0001-01-02

Status

Published

Research group

  • Internal Medicine - Epidemiology