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Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography

Author

  • Víctor J. Gómez
  • Mariusz Graczyk
  • Reza Jafari Jam
  • Sebastian Lehmann
  • Ivan Maximov

Summary, in English

In this manuscript, we demonstrate the potential of replacing the standard bottom anti-reflective coating (BARC) with a polymethylglutarimide (PMGI) layer for wafer-scale nanofabrication by means of deep-UV displacement talbot lithography (DTL). PMGI is functioning as a developable non-UV sensitive bottom anti-reflective coating (DBARC). After introducing the fabrication process using a standard BARC-based coating and the novel PMGI-based one, the DTL nanopatterning capabilities for both coatings are compared by means of the fabrication of etched nanoholes in a dielectric layer and metal nanodots made by lift-off. Improvement of DTL capabilities are attributed to a reduction of process complexity by avoiding the use of O2 plasma etching of the BARC layer. We show the capacity of this approach to produce nanoholes or nanodots with diameters ranging from 95 to 200 nm at a wafer-scale using only one mask and a proper exposing dose. The minimum diameter of the nanoholes is reduced from 118 to 95 nm when using the PMGI-based coating instead of the BARC-based one. The possibilities opened by the PMGI-based coating are illustrated by the successful fabrication of an array of nanoholes with sub-100 nm diameter for GaAs nanowire growth on a 2″ GaAs wafer, a 2″ nanoimprint lithography (NIL) master stamp, and an array of Au nanodots made by lift-off on a 4″ silica wafer. Therefore, DTL possess the potential for wafer-scale manufacturing of nano-engineered materials.

Department/s

  • NanoLund
  • Solid State Physics

Publishing year

2020-05-05

Language

English

Publication/Series

Nanotechnology

Volume

31

Issue

29

Document type

Journal article

Publisher

IOP Publishing

Topic

  • Manufacturing, Surface and Joining Technology
  • Materials Chemistry

Keywords

  • Displacement Talbot lithography
  • Lift-off
  • nanofabrication
  • NIL stamp
  • NW growth template
  • sub-100 nm

Status

Published

ISBN/ISSN/Other

  • ISSN: 0957-4484