Your browser has javascript turned off or blocked. This will lead to some parts of our website to not work properly or at all. Turn on javascript for best performance.

The browser you are using is not supported by this website. All versions of Internet Explorer are no longer supported, either by us or Microsoft (read more here: https://www.microsoft.com/en-us/microsoft-365/windows/end-of-ie-support).

Please use a modern browser to fully experience our website, such as the newest versions of Edge, Chrome, Firefox or Safari etc.

Portrait of Ivan Maximov. Photo: Kennet Ruona

Ivan Maximov

Associate Professor, Coordinator Exploratory Nanotechnology

Portrait of Ivan Maximov. Photo: Kennet Ruona

Digital in-line holography on amplitude and phase objects prepared with electron beam lithography.

Author

  • Jörg Schwenke
  • Eleonora Lorek
  • Rafal Rakowski
  • Xinkui He
  • Anders Kvennefors
  • Anders Mikkelsen
  • Piotr Rudawski
  • Christoph Heyl
  • Ivan Maximov
  • Sven-Göran Pettersson
  • Anders Persson
  • Anne L'Huillier

Summary, in English

We report on the fabrication and characterization of amplitude and phase samples consisting of well defined Au or Al features formed on ultrathin silicon nitride membranes. The samples were manufactured using electron beam lithography, metallization and a lift-off technique, which allow precise lateral control and thickness of the metal features. The fabricated specimens were evaluated by conventional microscopy, atomic force microscopy and with the digital in-line holography set-up at the Lund Laser Centre. The latter uses high-order harmonic generation as a light source, and is capable of recovering both the shape and phase shifting properties of the samples. We report on the details of the sample production and on the imaging tests with the holography set-up.

Department/s

  • MAX IV Laboratory
  • Atomic Physics
  • Solid State Physics
  • Synchrotron Radiation Research
  • Department of Physics
  • NanoLund

Publishing year

2012

Language

English

Pages

196-201

Publication/Series

Journal of Microscopy

Volume

247

Issue

2

Document type

Journal article

Publisher

John Wiley and Sons

Topic

  • Atom and Molecular Physics and Optics

Status

Published

ISBN/ISSN/Other

  • ISSN: 0022-2720