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Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Jonas Tegenfeldt

Professor, Coordinator Nanobiology & Neuronanoscience

Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography

Author

  • B Bilenberg
  • M Hansen
  • D Johansen
  • V Ozkapici
  • C Jeppesen
  • P Szabo
  • I M Obieta
  • O Arroyo
  • Jonas Tegenfeldt
  • A Kristensen

Summary, in English

We, present a one-step technology for fabrication of Topas-based lab-on-a-chip (LOC) microsysterris by the use of thermal nanoimprint lithography (NIL). The technology is demonstrated by the fabrication of two working devices: a particle separator and a LOC with integrated optics for absorbance measurements. These applications demonstrate the fabrication of millimeter to micrometer-sized structures in one lithographic step. The use of NIL makes the technology easily scalable into the nanometer regime by the use of a suitable lithographic technique in the fabrication of the stamp. Processing issues such as environmental stress cracking of the Topas and the requirements to anti-sticking layers on the stamp when imprinting into Topas are discussed.

Department/s

  • Solid State Physics

Publishing year

2005

Language

English

Pages

2944-2949

Publication/Series

Journal of Vacuum Science and Technology B

Volume

23

Issue

6

Document type

Journal article

Publisher

American Institute of Physics (AIP)

Topic

  • Condensed Matter Physics

Status

Published

ISBN/ISSN/Other

  • ISSN: 1520-8567