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Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Jonas Tegenfeldt

Professor, Coordinator Nanobiology & Neuronanoscience

Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Nanoimprint in PDMS on glass with two-level hybrid stamp

Author

  • Patrick Carlberg
  • Lars Montelius
  • Jonas Tegenfeldt

Department/s

  • Solid State Physics
  • Nanometer structure consortium (nmC)-lup-obsolete

Publishing year

2008

Language

English

Pages

210-213

Publication/Series

Microelectronic Engineering

Volume

85

Issue

1

Document type

Journal article

Publisher

Elsevier

Topic

  • Condensed Matter Physics

Status

Published

Research group

  • Nanometer structure consortium (nmC)-lup-obsolete

ISBN/ISSN/Other

  • ISSN: 1873-5568