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Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Jonas Tegenfeldt

Professor, Coordinator Nanobiology & Neuronanoscience

Portrait of Jonas Tegenfeldt. Photo: Kennet Ruona

Fabrication of 10 nm enclosed nanofluidic channels

Author

  • Han Cao
  • Zhaoning Yu
  • Jian Wang
  • Jonas O. Tegenfeldt
  • Robert H. Austin
  • Erli Chen
  • Wei Wu
  • Stephen Y. Chou

Summary, in English

We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.

Department/s

  • Solid State Physics

Publishing year

2002-07-01

Language

English

Pages

174-176

Publication/Series

Applied Physics Letters

Volume

81

Issue

1

Document type

Journal article

Publisher

American Institute of Physics (AIP)

Status

Published

ISBN/ISSN/Other

  • ISSN: 0003-6951