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Knut Deppert

Knut Deppert

Professor

Knut Deppert

Positioning of nanometer-sized particles on flat surfaces by direct deposition from the gas phase

Author

  • Thomas J. Krinke
  • Heinz Fissan
  • Knut Deppert
  • Martin H. Magnusson
  • Lars Samuelson

Summary, in English

Arrangements of nanometer-sized particles were obtained on plane oxidized silicon substrates by direct deposition from the gas phase. The particles were attracted onto charge patterns created by contact charging. Monodisperse, singly charged indium aerosol particles with a diameter of 30 nm were used as a test case to illustrate this process. Due to the surface treatment, the deposition is highly selective. We were able to create lines of particles with widths as narrow as 100 nm and several millimeters in length. The resolution of the pattern depends mainly on the surface treatment and the tool geometry. Our approach opens the possibility of creating patterns composed of nanometer-sized particles on a flat substrate surface by the simple transfer of charge patterns, without a lithographical process.

Department/s

  • Solid State Physics

Publishing year

2001-06-04

Language

English

Pages

3708-3710

Publication/Series

Applied Physics Letters

Volume

78

Issue

23

Document type

Journal article

Publisher

American Institute of Physics (AIP)

Topic

  • Other Materials Engineering
  • Other Physics Topics

Status

Published

ISBN/ISSN/Other

  • ISSN: 0003-6951