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Portrait of Reine Wallenberg. Photo: Kennet Ruona

Reine Wallenberg

Professor, Coordinator Materials Science

Portrait of Reine Wallenberg. Photo: Kennet Ruona

Aerotaxy: High throughput gas-phase epitaxy of nanostructures


  • Knut Deppert
  • Sudhakar Sivakumar
  • Axel Persson
  • Wondwosen Metaferia
  • Reine Wallenberg
  • Magnus Heurlin
  • Lars Samuelson
  • Jonas Johansson
  • Martin H. Magnusson

Summary, in English

Aerotaxy is an aerosol-based growth method for semiconductors and we present in detail how aerotaxy can be used to grow nanowires continuously with controlled nanoscale dimensions, with a high degree of crystallinity and remarkable throughput, including process details and our current understading of the growth processes. Catalytic size-selected Au aerosol particles travel through a heated flow-through reactor and mix with III–V precursor flux, which nucleates the growth of nanowires. We demonstrate that the method allows sensitive and reproducible control of the nanowire dimensions and shape. The reported continuous and potentially high-throughput method is expected to substantially reduce the cost of producing high-quality nanowires and may enable the low-cost fabrication of nanowire-based devices on an industrial scale.


  • Solid State Physics
  • NanoLund
  • Centre for Analysis and Synthesis
  • Department of Physics
  • Engineering Physics (M.Sc.Eng.)

Publishing year




Document type

Conference paper: abstract


  • Nano Technology

Conference name

European Aerosol Conference 2020

Conference date

2020-08-31 - 2020-09-04

Conference place

Aachen, Germany