About / Contacts
Lund Nano Lab (LNL) is our world-class clean room laboratory. It is available to users from academic research groups and industry – an open research facility equipped with state-of-the-art semiconductor processing and metrology equipment.
Lund Nano Lab (LNL) is an open-access cleanroom nanofabrication facility, which provides state-of-the-art equipment and expertise in the fabrication and characterization of nanostructures used in basic and applied research.
Organizationally, LNL belongs to the Division of Solid State Physics of the Physics Department and is also a part of NanoLund – the center of nanoscience research at Lund University. The laboratory closely cooperates with other cleanroom facilities in Sweden within the Myfab network and with other major Scandinavian cleanrooms.
In-house expertise
The expert staff of Lund Nano Lab provides knowledge and guidance in the fabrication and analysis of structures at the nanometer scale. Some of the methods of fabrication include electron beam lithography (EBL), nanoimprint lithography (NIL), optical lithography, reactive ion etching (RIE), thermal evaporation, atomic layer deposition (ALD), magnetron sputtering, and many more. Further, unique expertise in epitaxial methods of III-V semiconductor nanowire growth is also available.
Equipment
More than 80 different tools, installed in class ISO 5 - 8 cleanroom areas are available to all lab users. The equipment includes two high-resolution EBL tools, a nanoimprint unit, several mask aligners, a combined FIB/SEM, three RIE tools, deposition and sputtering equipment, annealing furnaces, and many more. Characterization of nanostructures and devices can be performed by different tools, for example, three scanning electron microscopes (SEM), an atomic force microscope (AFM), ellipsometer, X-ray diffractometer, several optical microscopes, and other inspection equipment. All equipment in the lab is accessible for lab users after appropriate hands-on training by the lab staff. The full list of equipment is available on LNL’s LIMS page.
Typical users
Most of the LNL users come from academic research groups, mainly from Lund University and other Swedish universities. At the same time, the laboratory is the main nanofabrication facility for several start-up companies.
We welcome all users to access the equipment for fundamental research and development in the fields of materials science, nanotechnology, microelectronics, life science, and quantum technology.
Myfab
The Lund Nano Lab has been a member of Myfab, the Swedish Research Infrastructure for Micro and Nano Fabrication since 2016.
- Myfab Annual Report 2023 (pdf, 3.02 MB, opens in new window)
Luke Hankin
Email: luke [dot] hankin [at] ftf [dot] lth [dot] se
Telephone: +46 46 222 36 47
Anders Kvennefors
Email: anders [dot] kvennefors [at] ftf [dot] lth [dot] se
Telephone: +46 46 222 09 30
Capabilities and equipment
Myfab
Lund Nano Lab is a member of Myfab – the Swedish research infrastructure for micro- and nanofabrication, supported by the Swedish Research Council. Other members are KTH, Chalmers and Uppsala University.