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Capabilities and Equipment

Lund Nano Lab (LNL) is an open research facility that is available to academic research groups, start-ups, and company users. Our world-class clean room facility is equipped with state-of-the-art semiconductor processing and metrology equipment. LNL is staffed with metrology, equipment, and process experts who are available to train and guide you. The specific tools are presented below.

To find tool-specific documentation including user manuals, process information, baseline data, and safety information – visit our user page!

The Lund Nano Lab user page